International Journal of Computational Intelligence Systems

Volume 4, Issue 3, May 2011, Pages 321 - 328

Videometrics-based Detection of Vibration Linearity in MEMS Gyroscope

Authors
Yong Zhou, Haigang Sun, Shiqiao Gao, Shaohua Niu
Corresponding Author
Yong Zhou
Available Online 20 May 2011.
DOI
https://doi.org/10.2991/ijcis.2011.4.3.5How to use a DOI?
Keywords
MEMS gyroscope, videometrics, vibration system, linearity
Abstract
MEMS gyroscope performs as a sort of sensor to detect angular velocity, with diverse applications in engineering including vehicle and intelligent traffic etc. A balanced vibration of driving module excited by electrostatic driving signal is the base MEMS gyroscope's performance. In order to analyze the linear property of vibration in MEMS Gyroscope, a method of computer vision measuring is applied with the help of high-speed vidicon to obtain video of linear vibration of driving module in gyroscope, under the driving voltage signal of inherent frequency and amplitude linearly increasing. By means of image processing, target identifying, and motion parameter extracting from the obtained video, vibration curve with time variation is acquired. And then, linearity of this vibration system can be analyzed by focusing on the amplitude value of vibration responding to the amplitude variation of driving voltage signal.
Open Access
This is an open access article distributed under the CC BY-NC license.

Download article (PDF)

Journal
International Journal of Computational Intelligence Systems
Volume-Issue
4 - 3
Pages
321 - 328
Publication Date
2011/05
ISSN
1875-6883
DOI
https://doi.org/10.2991/ijcis.2011.4.3.5How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - JOUR
AU  - Yong Zhou
AU  - Haigang Sun
AU  - Shiqiao Gao
AU  - Shaohua Niu
PY  - 2011
DA  - 2011/05
TI  - Videometrics-based Detection of Vibration Linearity in MEMS Gyroscope
JO  - International Journal of Computational Intelligence Systems
SP  - 321
EP  - 328
VL  - 4
IS  - 3
SN  - 1875-6883
UR  - https://doi.org/10.2991/ijcis.2011.4.3.5
DO  - https://doi.org/10.2991/ijcis.2011.4.3.5
ID  - Zhou2011
ER  -