The Realization of the Parametric Excitation on MEMS Gyroscope
Authors
Lei Qian, Heming Zhao, Dacheng Xu, Xiaofeng Zhang
Corresponding Author
Lei Qian
Available Online November 2017.
- DOI
- 10.2991/amms-17.2017.8How to use a DOI?
- Keywords
- MEMS gyroscope; parametric excitation; closed-loop system
- Abstract
In this paper, parametric excitation is applied to the excitation of a micro-ring gyroscope. The primary objective of this work is to improve the dynamic gain. It is show that, by adjusting the parametric excitation parameters, the harmonic forcing can be reduced whilst the gain of frequency response can be amplified. Because of the different frequencies of the excitation and harmonic forcing, the unwanted effect of electrical feed-through can keep in a minimum value.
- Copyright
- © 2017, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Lei Qian AU - Heming Zhao AU - Dacheng Xu AU - Xiaofeng Zhang PY - 2017/11 DA - 2017/11 TI - The Realization of the Parametric Excitation on MEMS Gyroscope BT - Proceedings of the 2017 International Conference on Applied Mathematics, Modeling and Simulation (AMMS 2017) PB - Atlantis Press SP - 36 EP - 39 SN - 1951-6851 UR - https://doi.org/10.2991/amms-17.2017.8 DO - 10.2991/amms-17.2017.8 ID - Qian2017/11 ER -