Electrowetting display pixels fabricated by nanoimprint lithography

DOI

10.2991/asei-15.2015.100How to use a DOI?

Keywords

Electrowetting displays, nanoimprint lithography, RIE

Abstract

Electrowetting displays (EWD) is a novel technology, based on the variation in coverage of a colored oil film in pixels via application of an electrostatic force. These pixels are usually fabricated by photolithography, which seriously limits materials selection and large area fabrication. In this paper, we demonstrate the feasibility of a novel method, nanoimprint lithography (NIL), to fabricate EWD pixels. Controllable contraction and recovery of oil film in single EWD pixels was realized. Compared with conventional lithography, NIL provides a cost- and time- saving technique that generates comparable display properties and is able to be easily extended to the mass production.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Q.T. Di
AU  - H. Zhang
AU  - X.L. Liang
AU  - A.D. Li
AU  - C.S. Xiao
AU  - D. Wu
AU  - Q.Y. Xu
PY  - 2015/05
DA  - 2015/05
TI  - Electrowetting display pixels fabricated by nanoimprint lithography
BT  - Proceedings of the 2015 International conference on Applied Science and Engineering Innovation
PB  - Atlantis Press
SP  - 495
EP  - 501
SN  - 2352-5401
UR  - https://doi.org/10.2991/asei-15.2015.100
DO  - 10.2991/asei-15.2015.100
ID  - Di2015/05
ER  -