Electrowetting display pixels fabricated by nanoimprint lithography
Q.T. Di, H. Zhang, X.L. Liang, A.D. Li, C.S. Xiao, D. Wu, Q.Y. Xu
Available Online May 2015.
- 10.2991/asei-15.2015.100How to use a DOI?
- Electrowetting displays, nanoimprint lithography, RIE
Electrowetting displays (EWD) is a novel technology, based on the variation in coverage of a colored oil film in pixels via application of an electrostatic force. These pixels are usually fabricated by photolithography, which seriously limits materials selection and large area fabrication. In this paper, we demonstrate the feasibility of a novel method, nanoimprint lithography (NIL), to fabricate EWD pixels. Controllable contraction and recovery of oil film in single EWD pixels was realized. Compared with conventional lithography, NIL provides a cost- and time- saving technique that generates comparable display properties and is able to be easily extended to the mass production.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Q.T. Di AU - H. Zhang AU - X.L. Liang AU - A.D. Li AU - C.S. Xiao AU - D. Wu AU - Q.Y. Xu PY - 2015/05 DA - 2015/05 TI - Electrowetting display pixels fabricated by nanoimprint lithography BT - Proceedings of the 2015 International conference on Applied Science and Engineering Innovation PB - Atlantis Press SP - 495 EP - 501 SN - 2352-5401 UR - https://doi.org/10.2991/asei-15.2015.100 DO - 10.2991/asei-15.2015.100 ID - Di2015/05 ER -