Thermodynamic analysis and experimental study of TiB2 coatings by CVD
Authors
Xiaoxiao Huang, Shuchen Sun, Shuaidan Lu, Xiaoping Zhu, Kuanhe Li, Ganfeng Tu
Corresponding Author
Xiaoxiao Huang
Available Online August 2015.
- DOI
- 10.2991/ic3me-15.2015.374How to use a DOI?
- Keywords
- Thermodynamics; Titanium diboride; Chemical vapor deposition.
- Abstract
The coatings of titanium dibordie (TiB2) on a high purity graphite substrate by chemical vapor deposition (CVD) was studied by using a gas mixture of TiCl4, BCl3 and H2. The reaction thermodynamics and the influences of TiCl4: BCl3 flow ratio on the growth rate of TiB2 are analyzed by using HSC software, X-ray diffraction, FESEM and EDS. The experimental results indicate that TiCl4 is according to the theory of gradual dechlorinating in this reaction and a large excess of H2 and TiCl4 can improve the growth rate of TiB2.
- Copyright
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Xiaoxiao Huang AU - Shuchen Sun AU - Shuaidan Lu AU - Xiaoping Zhu AU - Kuanhe Li AU - Ganfeng Tu PY - 2015/08 DA - 2015/08 TI - Thermodynamic analysis and experimental study of TiB2 coatings by CVD BT - Proceedings of the 3rd International Conference on Material, Mechanical and Manufacturing Engineering PB - Atlantis Press SP - 1942 EP - 1947 SN - 2352-5401 UR - https://doi.org/10.2991/ic3me-15.2015.374 DO - 10.2991/ic3me-15.2015.374 ID - Huang2015/08 ER -