Proceedings of the 5th International Conference on Advanced Design and Manufacturing Engineering

Numerical Simulation Study on Flow Characteristics of Supercritical Carbon Dioxide in a New Cleaning Chamber

Authors
Guangya Jin, Ya Wang, Jiapeng Wang, Songyang Zhu
Corresponding Author
Guangya Jin
Available Online October 2015.
DOI
https://doi.org/10.2991/icadme-15.2015.51How to use a DOI?
Keywords
Supercritical carbon dioxide, cleaning chamber, flow characteristics, wall shear stress
Abstract
Large amounts of organic solvents and pure water have been consumed in conventional semiconductor cleaning technology. And low dielectric constant (Low-K) material may be destroyed easily during the cleaning process, which will also cause structural collapse of the material. All these shortcomings can be rid by cleaning technique using supercritical carbon dioxide (SC-CO2) as a medium. As an environmental friendly solvent, SC-CO2 has been applied in wafer cleaning field for some unique advantages such as high solvency, high diffusivity, low viscosity, low surface tension and other characteristics. In this study, a new cleaning chamber using SC-CO2 is designed and a simplified model is established by CFD software. On this basis, the flow field characteristics of SC-CO2 in the chamber are simulated, and the corresponding wall shear stress distribution is obtained by altering the rotation speed of the inner cylinder and the outlet pressure of multi-directional nozzles. The simulation results aim to offer ideas for expanding applications of SC-CO2 as a green solvent.
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Volume Title
Proceedings of the 5th International Conference on Advanced Design and Manufacturing Engineering
Series
Advances in Engineering Research
Publication Date
October 2015
ISBN
978-94-6252-113-1
ISSN
2352-5401
DOI
https://doi.org/10.2991/icadme-15.2015.51How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Guangya Jin
AU  - Ya Wang
AU  - Jiapeng Wang
AU  - Songyang Zhu
PY  - 2015/10
DA  - 2015/10
TI  - Numerical Simulation Study on Flow Characteristics of Supercritical Carbon Dioxide in a New Cleaning Chamber
BT  - Proceedings of the 5th International Conference on Advanced Design and Manufacturing Engineering
PB  - Atlantis Press
SP  - 255
EP  - 260
SN  - 2352-5401
UR  - https://doi.org/10.2991/icadme-15.2015.51
DO  - https://doi.org/10.2991/icadme-15.2015.51
ID  - Jin2015/10
ER  -