Microstructure Fabricated by Monocrystalline Silicon Anisotropic Etching in Sodium Carbonate and Sodium Bicarbonate Solutions
- DOI
- 10.2991/icectt-15.2015.109How to use a DOI?
- Keywords
- Microstructure; Monocrystalline silicon; Texturization; Coverage rate
- Abstract
The fabrication method of microstructure for monocrystalline silicon wafers based on a mixture of sodium carbonate and sodium bicarbonate solutions under different conditions has been studied in this work. The texturization process has been evaluated in terms of the surface morphology size and the coverage rate. The experiments show that the influence of Na2CO3 concentration is significant by varying the concentration between 5 wt% and 30 wt%. It was shown that with the concentration of Na2CO3 changing, the average size of pyramidal varies from 1.20 m to 2.44 m. In a word, the surface were not uniform and exhibited wide bright zones in which the texturization process was not successful. However, we find it possible to get a better pyramid structure by the addition of NaHCO3. Uniform microstructure in the wafers of monocrystalline silicon were formed with 20 wt% sodium carbonate and 5 wt% sodium bicarbonate at 90 for 20 min. Under optimized conditions, the textured silicon wafers surface exhibit a lower average size (about 0.96 m) and the coverage rate is high.
- Copyright
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Junjun Ma AU - Ruizhi Luo AU - Yaqin Wang AU - Shiqing Man PY - 2015/11 DA - 2015/11 TI - Microstructure Fabricated by Monocrystalline Silicon Anisotropic Etching in Sodium Carbonate and Sodium Bicarbonate Solutions BT - Proceedings of the 2015 International Conference on Electromechanical Control Technology and Transportation PB - Atlantis Press SP - 570 EP - 575 SN - 2352-5401 UR - https://doi.org/10.2991/icectt-15.2015.109 DO - 10.2991/icectt-15.2015.109 ID - Ma2015/11 ER -