Proceedings of the 2015 International Conference on Mechatronics, Electronic, Industrial and Control Engineering

SH-SAWs in layered Piezoelectric Structures Carrying an Array of Microbeams

Authors
Lili Yuan, Xian Fu, Benjie Ding
Corresponding Author
Lili Yuan
Available Online April 2015.
DOI
10.2991/meic-15.2015.288How to use a DOI?
Keywords
SH-SAW; dispersion; piezoelectric; microbeam layered structure
Abstract

Shear horizontal surface acoustic waves (SH-SAWS) propagation in layered piezoelectric structure carrying an array of microbeams is studied in this paper. Based on the three-dimensional piezoelectricity theory, the coupling wave equations are obtained and solved by analytical method with consideration of both electrically open and short conditions. The beams are modeled using the Euler-Bernoulli theories when they are bending during the piezoelectric structures in shear motion. The effects of the microbeams on the phase velocity are presented and discussed in detail. From the results, we can find the phase velocity decrease with the non-dimensional wave number, while it is increase with the number of the microbeams. The geometric parameters of the cantilever beams, such as Young’s modulus, diameter and length have evident effect on the phase velocity, we can find that the phase velocity decrease with length-diameter ratio of the cantilever beams. The method and results presented in the paper could be useful to the analysis and design of surface acoustic wave devices.

Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2015 International Conference on Mechatronics, Electronic, Industrial and Control Engineering
Series
Advances in Engineering Research
Publication Date
April 2015
ISBN
10.2991/meic-15.2015.288
ISSN
2352-5401
DOI
10.2991/meic-15.2015.288How to use a DOI?
Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Lili Yuan
AU  - Xian Fu
AU  - Benjie Ding
PY  - 2015/04
DA  - 2015/04
TI  - SH-SAWs in layered Piezoelectric Structures Carrying an Array of Microbeams
BT  - Proceedings of the 2015 International Conference on Mechatronics, Electronic, Industrial and Control Engineering
PB  - Atlantis Press
SP  - 1266
EP  - 1269
SN  - 2352-5401
UR  - https://doi.org/10.2991/meic-15.2015.288
DO  - 10.2991/meic-15.2015.288
ID  - Yuan2015/04
ER  -