Proceedings of the 3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016)

Numerical Analysis and Optimization of Internal Flow Field in Optical Module of DUV Laser

Authors
Bin Liu, Jin-Bin Ding, Kui-Bo Wang, Peng-Fei Sha, Yi Zhou, Yu Wang
Corresponding Author
Bin Liu
Available Online December 2016.
DOI
https://doi.org/10.2991/mme-16.2017.138How to use a DOI?
Keywords
CFD, DUV laser, Flow field.
Abstract
In this paper, the internal flow field in an optical module of DUV laser was analyzed by ANSYS Fluent based on the finite volume method. The way of purging nitrogen was optimized according to the results of the analysis. After the optimization, a better nitrogen purge method was obtained, and a flow field with uniform velocity and low turbulence energy was obtained on the laser transmission path. The results of this paper can provide a reference for the design of the gas purge system of DUV laser.
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This is an open access article distributed under the CC BY-NC license.

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Proceedings
3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016)
Part of series
Advances in Engineering Research
Publication Date
December 2016
ISBN
978-94-6252-303-6
ISSN
2352-5401
DOI
https://doi.org/10.2991/mme-16.2017.138How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Bin Liu
AU  - Jin-Bin Ding
AU  - Kui-Bo Wang
AU  - Peng-Fei Sha
AU  - Yi Zhou
AU  - Yu Wang
PY  - 2016/12
DA  - 2016/12
TI  - Numerical Analysis and Optimization of Internal Flow Field in Optical Module of DUV Laser
BT  - 3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016)
PB  - Atlantis Press
SN  - 2352-5401
UR  - https://doi.org/10.2991/mme-16.2017.138
DO  - https://doi.org/10.2991/mme-16.2017.138
ID  - Liu2016/12
ER  -