Development of MEMS Angular Rate Sensor with Self-calibration Function
- 10.2991/aime-17.2017.139How to use a DOI?
- angular velocity sensor; design, signal, transfer characteristic.
In the paper, new principles and methods for determining the transfer characteristic parameters for a micromechanical angular velocity sensor, as well as an assessment of the significance and efficiency of these parameters, have been described. The structure and algorithms for obtaining and processing calibration coefficients for implementing the MEMS self-calibration functions have been developed. The possibilities and degree of automation of processes for obtaining individual characteristics, testing and calibration have been determined.
- © 2017, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - S. Timoshenkov AU - N. Korobova AU - A. Mikheev AU - A. Timoshenkov PY - 2017/07 DA - 2017/07 TI - Development of MEMS Angular Rate Sensor with Self-calibration Function BT - Proceedings of the International Conference "Actual Issues of Mechanical Engineering" 2017 (AIME 2017) PB - Atlantis Press SP - 860 EP - 865 SN - 2352-5401 UR - https://doi.org/10.2991/aime-17.2017.139 DO - 10.2991/aime-17.2017.139 ID - Timoshenkov2017/07 ER -