Development of MEMS Angular Rate Sensor with Self-calibration Function

DOI

10.2991/aime-17.2017.139How to use a DOI?

Keywords

angular velocity sensor; design, signal, transfer characteristic.

Abstract

In the paper, new principles and methods for determining the transfer characteristic parameters for a micromechanical angular velocity sensor, as well as an assessment of the significance and efficiency of these parameters, have been described. The structure and algorithms for obtaining and processing calibration coefficients for implementing the MEMS self-calibration functions have been developed. The possibilities and degree of automation of processes for obtaining individual characteristics, testing and calibration have been determined.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - S. Timoshenkov
AU  - N. Korobova
AU  - A. Mikheev
AU  - A. Timoshenkov
PY  - 2017/07
DA  - 2017/07
TI  - Development of MEMS Angular Rate Sensor with Self-calibration Function
BT  - Proceedings of the International Conference "Actual Issues of Mechanical Engineering" 2017 (AIME 2017)
PB  - Atlantis Press
SP  - 860
EP  - 865
SN  - 2352-5401
UR  - https://doi.org/10.2991/aime-17.2017.139
DO  - 10.2991/aime-17.2017.139
ID  - Timoshenkov2017/07
ER  -