Fabrication of Micro Solid Metal Needles by Electroplating from PMMA Mold
Authors
Y.G. Li, Y. Huang, P. Yan, S. Sugiyama
Corresponding Author
Y.G. Li
Available Online November 2015.
- DOI
- 10.2991/iccet-15.2015.307How to use a DOI?
- Keywords
- Moving X-ray lithography, Micro metal needles, Electroplating, Transfer pattern technology
- Abstract
A nickel solid micro needles array is fabricated by electroplating process based on a PMMA solid micro needles mold. The PMMA mold is fabricated by the moving mask X-ray lithography method. Ni Micro needle array is fabricated by PDMS female mold which is fabricated by using PMMA micro needle array as a master, and transfer PDMS micro needle to Ni micro needle by sputtering the seed layer on the PDMS mold and electroplating metal Ni to forming Ni micro needle array. The fabrication method is practical and a Ni micro needle array with the height of 168 m is obtained. The fabrication technology is practical for the fabrication a complex micro metal structures and it has a high yield.
- Copyright
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Y.G. Li AU - Y. Huang AU - P. Yan AU - S. Sugiyama PY - 2015/11 DA - 2015/11 TI - Fabrication of Micro Solid Metal Needles by Electroplating from PMMA Mold BT - Proceedings of the 5th International Conference on Civil Engineering and Transportation 2015 PB - Atlantis Press SP - 1647 EP - 1650 SN - 2352-5401 UR - https://doi.org/10.2991/iccet-15.2015.307 DO - 10.2991/iccet-15.2015.307 ID - Li2015/11 ER -