A Wireless Surface Acoustic Wave-based Tire Pressure and Temperature Sensing Module

DOI

10.2991/icimm-15.2015.83How to use a DOI?

Keywords

Lithium niobate (LiNbO3); piezoelectric effect; pressure and temperature sensing; surface acoustic wave component; wireless sensor

Abstract

Based on the piezoelectric and temperature effects of lithium niobate (LiNbO3) wafer, this paper presents a design of a one-port resonator-type interdigital surface acoustic wave-based sensing device with a wireless transmission function for measuring vehicle tire pressure and temperature. The sensing components of the proposed device comprised a double-layered 3-D structure for measuring pressure and temperature changes simultaneously. The pressure-sensing film on the top layer of the wafer was formed by anisotropic back-etching. This feature enhanced the sensitivity of the device by 33% compared with sensing components featuring planar structures. Furthermore, the sealed bottom layer of the wafer served as a linear temperature sensor. The proposed sensing module was characterized as having a temperature sensing range of 25–95 °C with sensitivity 4.05 kHz/°C and pressure sensing range of 0–5 bar with sensitivity 8.19 kHz/bar.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Hsing-Cheng Chang
AU  - San-Sah Hung
AU  - Yahui Chen
AU  - Minghan Tsai
PY  - 2015/07
DA  - 2015/07
TI  - A Wireless Surface Acoustic Wave-based Tire Pressure and Temperature Sensing Module
BT  - Proceedings of the 5th International Conference on Information Engineering for Mechanics and Materials
PB  - Atlantis Press
SP  - 440
EP  - 444
SN  - 2352-5401
UR  - https://doi.org/10.2991/icimm-15.2015.83
DO  - 10.2991/icimm-15.2015.83
ID  - Chang2015/07
ER  -