TFT substrate glass geometrical parameter measurement and data processing
- 10.2991/peee-15.2015.35How to use a DOI?
- TFT glass, Spectral confocal sensor, Measuring platform
This paper has analyzed various sensors for the measurement of the TFT substrate glass geometric parameters and ascertain one of optical sensor for this task. The influence of measuring accuracy due to measuring platform has been studied, and then a solution for guarantee high precession measurement has been proposed.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - H. Guo PY - 2015/04 DA - 2015/04 TI - TFT substrate glass geometrical parameter measurement and data processing BT - Proceedings of the 2015 International Conference on Power Electronics and Energy Engineering PB - Atlantis Press SP - 129 EP - 133 SN - 2352-5401 UR - https://doi.org/10.2991/peee-15.2015.35 DO - 10.2991/peee-15.2015.35 ID - Guo2015/04 ER -